Material Sciences
3D Topography Scan
The combination of SEM and AFM systems provides a powerful tool for obtaining accurate three-dimensional topography information. SEM captures 2D images, by detecting secondary electrons and back-scattered electrons, at a high frame rate and high resolution to guide the AFM cantilever to a region-of-interest (ROI), within which AFM generates a detailed 3D topography.
 Metrology Chip |  DVD Surface |
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Mechanical Nanoindentation
Nanoindentation permits quantitative nanomechanical measurement of a sample. By performing nanoindentation inside SEM, one can benefit from the use of SEM analytical tools (e.g., EDX and EBSD) to analyze materials and pin-point region of interest while visually observing the dynamic indentation process in real time. TNI EM-AFM utilizes proprietary position sensing technologies to ensure highly repeatable and accurate nanoindentation measurement.
Nanowire Measurements
Nanomechanical properties of a single nanowire can be experimentally measured through various means. TNI EM-AFM, or TNI LF nanomanipulation system combined with the Nano Force Sensor module, is capable of performing highly accurate tensile, compression, and piezoresistive measurements inside SEM.
 Nanowire tensile/compression testing |  MEMS based piezoresistive tester |  Schematic |
|---|---|---|
 Nanowire isolation from a bundle |  Move nanowire to the tester |  Place nanowire across testing gap |
 Solder nanowire in place with EBID |
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Y. Zhang, X.Y. Liu, C.H. Ru, Y.L. Zhang, L.X. Dong, and Y. Sun, "Piezoresistivity characterization of synthetic silicon nanowires using a MEMS device," IEEE/ASME J. MEMS, Vol. 20, pp. 959-967, 2011.
Four-Point Electrical Probing
Four-point probing is used to measure material resistivity. One challenge in probing nano-scaled materials is the landing of four nano probes gently on the sample. Due to the lack of depth information from SEM imaging, probe-sample contact detection is a time consuming, skill dependent process that often results in probe/sample damage. TNI LF is the only commercial system that provides long-range, vibration free, flexure-guided positioning with position feedback. After probe-sample contact is established, the instrument can save the coordinates for future use. This eliminates the need to repeat the challenging probe-sample contact detection process.
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C.H. Ru, Y. Zhang, Y. Sun*, Y. Zhong, X.L. Sun, D. Hoyle, and I. Cotton, "Automated four-point probe measurement of nanowires inside a scanning electron microscope," IEEE Trans. on Nanotechnology, Vol. 10, pp. 674-681, 2011.
Nanowire Measurements
Nanomechanical properties of a single nanowire can be experimentally measured through various means. TNI EM-AFM, or TNI LF nanomanipulation system combined with the Nano Force Sensor module, is capable of performing highly accurate tensile, compression, and piezoresistive measurements inside SEM.
Nanowire tensile/compression testing | MEMS based piezoresistive tester | Schematic |
|---|---|---|
Nanowire isolation from a bundle | Move nanowire to the tester | Place nanowire across testing gap |
Solder nanowire in place with EBID |
-
Y. Zhang, X.Y. Liu, C.H. Ru, Y.L. Zhang, L.X. Dong, and Y. Sun, "Piezoresistivity characterization of synthetic silicon nanowires using a MEMS device," IEEE/ASME J. MEMS, Vol. 20, pp. 959-967, 2011.